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º»°ÝÀûÀÎ ICR(»ê¾÷¿ëÅ©¸°·ë)±Ô°ÝÀ¸·Î 1963³â ¹Ì±¹¿¬¹æ±Ô°Ý 209B(Federal Standard 209B)°¡ Á¦Á¤µÇ¾ú´Ù. ±Ô°ÝÀº ûÁ¤µµ ÀÌ¿Ü, ¾Ð·Â, ±â·ù¼Óµµ, ¿Âµµ, ½Àµµ, Á¶µµ¿¡ ÀÇÇØ ´ëÇؼ­µµ ±ÔÁ¤ÇÏ°í ÀÖ´Ù. FS209´Â 1988³âÀÇ 209D, 1992³âÀÇ 209E¿Í ¼öȸ º¯°æµÇ¾ú´Ù. ÇÑÆí, ´Ù¸¥ ³ª¶ó¿¡¼­´Â FS209¸¦ Âü°í·Î ÇÏ¿© µ¶ÀÚÀÇ ±Ô°ÝÀ» »ç¿ëÇÏ°í ÀÖ´Ù. ÀϺ»¿¡¼­´Â 1§©ÀÇ °ø±âÁß¿¡ Æ÷ÇԵǾîÀÖ´Â ÀÔÀÚ°æÀÌ 0.1§­ÀÌ»óÀÇ ÀÔÀÚ¼ö¸¦ 10ÀÇ ÀÚ½ÂÀ¸·Î Ç¥½ÃÇÑ Áö¼ö (10N/§©ÀÇ N)¸¦ Ŭ¶ó½º Ç¥½Ã·Î ÇÏ°í ÀÖ´Ù. ±×¸®°í 1999³â ûÁ¤µµ¿¡ °üÇÑ ±¹Á¦±Ô°ÝÀÎ ISO14644°¡ ¹ßÇ¥µÇ¾î ¼¼°èÀû ±Ô°ÝÀÇ ÅëÀÏ¿¡ ÇÑ¹ß ÀüÁøÇÏ°Ô µÇ¾ú´Ù. BCR(»ý¹°¿ëÅ©¸°·ë)±Ô°ÝÀº NASA±Ô°Ý¿¡ ±ÔÁ¤µÇ¾î ÀÖ°í, NHB 5340.1°ú 5340.2°¡ ÀÖ´Ù. ÀÌµé ±Ô°ÝÀÇ ³»¿ëÀº FS209B ¿Í °ÅÀÇ °°Áö¸¸, ¹Ì»ý¹° ³óµµ¸¦ ´õÇÏ°í ÀÖ´Ù. ÀÌµé ±Ô°Ý¿¡¼­ »ý¹°ÀÔÀÚ¿¡ °üÇÑ ±ÔÁ¤¸¸À» ÃßÃâÇÑ °ÍÀÌ´Ù. ¹Ì»ý¹°Àº Å« °ÍÀº ´Üµ¶À¸·Î ÀÛÀº °ÍÀº ¹ÌÀÔÀÚ¿¡ ºÎÂøÇÏ¿© °ø±âÁß¿¡ ºÎÀ¯Çϱ⠶§¹®¿¡ ¹ÌÀÔÀÚ¸¦ Á¦¾î ÇÏ´Â °ÍÀº ¹Ì»ý¹°À» Á¦¾îÇÏ´Â °ÍÀ̶ó ÇÒ ¼ö ÀÖ´Ù. ±×¿ÜÀÇ °ü·Ã ±Ô°ÝÀ¸·Î´Â GMP(Good Manufacturing pracice)ÀÌ ÀÖ°í, ÀǾàÇ°Á¦Á¶°øÀå¿¡¼­ »ý»ê´Ü°èÀÇ Ç°Áú°ü¸®¸¦ À§ÇÑ ±âÁØÀ» Á¤ÇÏ°í ÀÖ´Ù. ºÎÀ¯¹ÌÀÔÀÚÀÇ ÃøÁ¤Àº °ü»ê¶õ½ÄÀÔÀÚ°è¼ö±â(LPCµî)¶Ç´Â ÀÀÃàÇÙ°è¼ö±â(CPC)¸¦ ÀÌ¿ëÇÑ´Ù. ¹Ì»ý¹° ÃøÁ¤Àº °øÁߺÎÀ¯±Õ, ³«ÇϱÕ, Ç¥¸éºÎÂø±ÕÀ¸·Î ³ª´©°í, »óȲ¿¡ µû¸¥ ÃøÁ¤¹ýÀÌ ÀÖÁö¸¸ ÀÌµé ¸ðµÎ°¡ ¼ÒÁ¤ÀÇ ¹è¾ç¹ýÀ¸·Î ¹ßÀ°½ÃŲ ±ÕÁý¶ô(colony)¼ö¸¦ ÃøÁ¤ÇÑ´Ù.
ISO 14644-1 ûÁ¤µµ µî±ÞÀÇ ºÐ·ù
ISO µî±ÞºÐ·ù No of Particles per §©
0.1§­ 0.2§­ 0.3§­ 0.5§­ 1.0§­ 5.0§­
ISO µî±Þ1 10 2 NA NA NA NA
ISO µî±Þ2 100 24 10 4 NA NA
ISO µî±Þ3 1,000 237 102 35 8 NA
ISO µî±Þ4 10,000 2,370 1,020 352 83 NA
ISO µî±Þ5 100,000 23,700 10,200 3,520 832 29
ISO µî±Þ6 1,000,000 237,000 102,000 35,200 8,320 293
ISO µî±Þ7 NA NA NA 352,000 83,200 2,930
ISO µî±Þ8 NA NA NA 3,520,000 832,000 29,300
ISO µî±Þ9 NA NA NA 35,200,000 8,320,000 293,000
NA : NOT APPLICATION
ISO 14644-1 ûÁ¤µµ µî±ÞÀÇ ºÐ·ù
KS M ISO µî±ÞºÐ·ù No of Particles per §©
0.1§­ 0.2§­ 0.3§­ 0.5§­ 1.0§­ 5.0§­
KS M ISO µî±Þ1 10 2 NA NA NA NA
KS M ISO µî±Þ2 100 24 10 4 NA NA
KS M ISO µî±Þ3 1,000 237 102 35 8 NA
KS M ISO µî±Þ4 10,000 2,370 1,020 352 83 NA
KS M ISO µî±Þ5 100,000 23,700 10,200 3,520 832 29
KS M ISO µî±Þ6 1,000,000 237,000 102,000 35,200 8,320 293
KS M ISO µî±Þ7 NA NA NA 352,000 83,200 2,930
KS M ISO µî±Þ8 NA NA NA 3,520,000 832,000 29,300
KS M ISO µî±Þ9 NA NA NA 35,200,000 8,320,000 293,000
NA : NOT APPLICATION
ISO 14644-1 & FS 209E ûÁ¤µµ µî±Þ ºñ±³Ç¥
Cleanliness Classification No of Particles per §©
ISO 14644-1 FS 209E 0.1§­ 0.2§­ 0.3§­ 0.5§­ 1.0§­ 5.0§­
ISO µî±Þ1 - 10 2 NA NA NA NA
ISO µî±Þ2 - 100 24 10 4 NA NA
ISO µî±Þ3 - 1,000 237 102 35 8 NA
- 1 1,240 265 106 35.3 NA NA
ISO µî±Þ4 - 10,000 2,370 1,020 352 83 NA
- 10 12,400 2,650 1,060 353 NA NA
ISO µî±Þ5 - 100,000 23,700 10,200 3,520 832 29
- 100 NA 26,500 10,600 3,530 NA NA
ISO µî±Þ6 - 1,000,000 237,000 102,000 35,200 8,320 293
- 1,000 NA NA NA 35,300 NA 247
ISO µî±Þ7 - NA NA NA 352,000 83,200 2,930
- 10,000 NA NA NA 353,000 NA 2,470
ISO µî±Þ8 - NA NA NA 3,520,000 832,000 29,300
- 100,000 NA NA NA 3,530,000 NA 24,700
ISO µî±Þ9 - NA NA NA 35,200,000 8,320,000 293,000
NA : NOT APPLICATION
¹ÙÀÌ¿À
Å©¸°·ëÀÇ
ûÁ¤µµ
ÀÔÀÚ ¹Ì»ý¹°ÀÔÀÚ ¾Ð·Â
(mmAq)
¿Âµµ
(¡É)
½Àµµ
(%)
±â·ùȯ±âȸ¼ö Á¶µµ(lux)
ÀÔ°æ
(§­)
´©Àû ÀÔÀÚ¼ö ºÎÀ¯·® ħ°­·®
°³/ft3 °³/§© °³/ft3 °³/§© °³/§©
ÁÖÀÏ
100 ¡Ã 0.5 ¡Â 100 ¡Â 3.5 0.1 0.0035 12,900 1.3ÀÌ»ó ÁöÁ¤ 40~45 - Ãþ·®¹æ½Ä
0.45M/s
¡¾0.1M/s

- ³­·ù¹æ½Ä
¡Ã 20ȸ/½Ã°£
1,080~1,620
10,000 ¡Ã 0.5
¡Ã 5.0
¡Â 10,000
¡Â 65
¡Â 350
¡Â 2.3
0.5 0.0176 64,600
100,000 ¡Ã 0.5
¡Ã 5.0
¡Â 100,000
¡Â 700
¡Â 3500
¡Â 2.5
2.5 0.0884 323,000
JIS B9920 ûÁ¤µµ µî±ÞÀÇ ºÐ·ù
µî±ÞºÐ·ù No of Particles per §© ûÁ¤µµ CLASS ÀÔ°æ¹üÀ§
0.1§­ 0.2§­ 0.3§­ 0.5§­ 5.0§­
CLASS 1 10 2 1 0.35 NA 0.1~0.3
CLASS 2 100 24 10 3.5 NA
CLASS 3 1,000 236 101 35 NA 0.1~0.5
CLASS 4 10,000 2,360 1,010 350 NA
CLASS 5 100,000 23,600 10,100 3,500 NA 0.1~0.5
CLASS 6 1,000,000 NA 101,000 35,000 29 0.3~0.5
CLASS 7 10,000,000 NA 1,010,000 350,000 2,900
CLASS 8 100,000,000 NA 10,100,000 3,500,000 29,000
NA : NOT APPLICATION
GMP ûÁ¤µµ °ü¸® ±âÁØ
ûÁ¤µµµî±Þ CLASS ÇØ´çÀÛ¾÷½Ç(¿¹½Ã) ±¸Á¶ Á¶°Ç ȯ±â Ƚ¼ö °ü¸® ±âÁØ
A 100 - ¹«±ÕÀû ÀÛ¾÷°øÁ¤À» ¼öÇàÇÏ´Â ÀÛ¾÷´ë
- ¹«±Õ Á¦Á¦ÀÇ ÃæÀü, ¹ÐºÀÀÛ¾÷´ë
- ´ÜÀÏ ¹æÇâ±â·ù
- Clean Bench/booth(B±¸¿ª³» ¼³Ä¡)
- HEPA FILTER
- ¼öÁ÷Çü:¾à0.3m/s
- ¼öÆòÇü:¾à0.45m/s
- 600ȸ/hrÀÌ»ó
- ÃÖ´ë »ý±Õ¼ö
³«ÇϱÕ:[1°³/hr(¥Õ9cm)]
ºÎÀ¯±Õ:[1°³/§©]
- ¹«±Õº¹Àå
B 10,000 - ¹«±ÕÁ¦Ç°ÀÇ ÀÛ¾÷½Ç ¹× ¹«±ÕÀÛ¾÷¿¡ ÇÊ¿äÇÑ °ü¸® ±¸¿ª
- ¹«±Õ ÀÛ¾÷ Àü¿ëÀÇ °»ÀÇ½Ç ¹× Áغñ½Ç
- ºñ´ÜÀÏ ¹æÇâ ±â·ù
- PRE + MEDIUM + HEPAFILTER
- ¾ç¾Ð(10~15Pa)
- 20ȸ/hrÀÌ»ó - ÃÖ´ë »ý±Õ¼ö
³«ÇϱÕ:5°³/hr
ºÎÀ¯±Õ:20°³/§©
- ¹«±Õº¹Àå
C 100,000 - ¹«±ÕÁ¦Ç°ÀÇ ¿ë±â ¼¼Ã´½Ç
- ÃÖÁ¾¸ê±ÕÁ¦Ç°(»ç¿ëÀÚ ¸ê±Õ Æ÷ÇÔ)ÀÇ ¼¼Ã´½Ç, ¼¼Ã´ ÈÄ º¸°ü½Ç
- ÃÖÁ¾¸ê±ÕÁ¦Ç°(»ç¿ëÀÚ ¸ê±Õ Æ÷ÇÔ)ÀÇ ÀÛ¾÷½Ç(ÃæÀü, Á¶¸³, Á÷Á¢Æ÷Àå µî)
- ºñ¸ê±Õ»óÅ·Π°ø±ÞµÇ³ª ±× û°áÀÌ »ç¿ë»ó Áß¿äÇÑ Á¦Ç°ÀÇ ÀÛ¾÷½Ç

- ºñ´ÜÀÏ ¹æÇâ ±â·ù
- PRE + MEDIUM(ÇÊ¿ä½Ã+HEPA) FILTER
- ¾ç¾Ð(10~15Pa)
- ¿Â,½Àµµ °ü¸®

- 10ȸ/hrÀÌ»ó - ÃÖ´ë »ý±Õ¼ö
³«ÇϱÕ:20°³/hr
ºÎÀ¯±Õ:200°³/§©
- Àü¿ëÀÇ ¹«Áøº¹Àå
D - - ûÁ¤µµ C±¸¿ª°ú ¿¬°áµÈ Áö¿ª
- ¹«Áø º¹Àå °»ÀǽÇ
- PRE FILTER
- ¿Â, ½Àµµ °ü¸®
- ȯ±â
±¹Á¦ Å©¸°·ë ±Ô°ÝÀÇ Á¾·ù
Á¾·ù ±Ô°Ý
°ø±â ûÁ¤µµ µî±Þ ¹Ì±¹ Federal Standard 209E(1992)
ÀϺ» JIS B 9920(1989)
µ¶ÀÏ VDI 2083(1990)
Çѱ¹ KS B 6741(1995), SPS-KACA001-0131(1996)
KS M ISO 14644-1(2002), KS M ISO 14644-2(2002)
±¹Á¦ ISO 14644-1(1999), ISO 14644-2(2000)
¼º´É Æò°¡ ¹Ì±¹ IEST-RP-CC006.3(2004)
ÀϺ» JACA No.24(1989)
Çѱ¹ SPS-KACA001-0131(1996), SPS-KACA003-0133(2000)
KS M ISO 14644-3(2006)
±¹Á¦ ISO 14644-3(2005)
¼³°è, ½Ã°ø Á¦ÀÛ Çѱ¹ SPS-KACA001-0131(1996), KS M ISO 14644-4(2002)
±¹Á¦ ISO 14644-4(2001)
¿î¿µ °ü¸® ¹Ì±¹ IEST-RP-CC026.1(1994)
ÀϺ» JACA No.14C(1992)
Çѱ¹ SPS-KACA001-0131(1996), KS M ISO 14644-5(2005)
±¹Á¦ ISO 14644-5(2004)
±âŸ ¹Ì±¹ IEST-RP-CC023.1(1993)
±¹Á¦ ISO 14644-7(2004), ISO 14644-8